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Silica Glass - Quartz

Contact Tosoh USA (Silica Glass products)

Tosoh USA, Inc. 
(CA Sales Office)
6000 Shoreline Court Ste 101
South San Francisco CA 94080
USA
Tell: Toll Free 1-888-799-0025
Fax: 1-650-210-4362
E-mail: info.tsgm@tosoh.com

Downloadable Files for Silica Glass

Fused Silica Glass

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SDS »
RoHS »
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Optical Fused Silica

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Terms and Conditions of Sale

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Fused Silica Glass (Fused Quartz)

   
Material: N Series
Description:
Tosoh N and NP materials are manufactured by fusing a high-purity silica powder using Tosoh's proprietary oxy-hydrogen flame fusion process. Thanks to its high purity, low aluminum content, and extremely low level of bubbles and inclusions, N has become the reference material for a broad range of applications: semiconductor manufacturing, metrology, optics, chemical processing, UV and high-temperature windows to name a few.

In particular, N is an enabling material for stringent plasma etch processes used in leading-edge semiconductor manufacturing.

NP is an enhanced version of N material, with further reduced alkali content for use in processes that require extreme contamination control.

Available in up to 1,200mm square ingots, N and NP materials are 450mm wafer ready.


Grades  Features 
N Semiconductor standard grade
NP  Semiconductor high-purity grade 
   
Material: OP Series
Description:
Tosoh OP-1 and OP-3 materials are manufactured by fusing high-purity silica powder using Tosoh's proprietary oxy-hydrogen flame fusion process and a method of generating uniformly dispersed small bubbles inside the material. Thanks to its high purity and excellent infrared blocking properties, OP-1 has become the material of choice as a heat-insulating material for semiconductor and solar manufacturing equipment, such as RTP chambers and oxidation, diffusion, and CVD batch furnaces.

OP-3 is an enhanced version of OP-1 material, with further reduced alkali content for use in processes that require extreme contamination control.

OP-3HD is a high-density version of OP-3, with a smaller diameter bubble size distribution that provides enhanced sealing properties and lifetime for advanced batch furnace processes.

Available in up to 1,000mm round and square ingots, OP-1, OP-3, and OP-3HD materials are 450mm wafer ready.


Grades  Features 
OP-1 Semiconductor standard grade
OP-3  Semiconductor high-purity grade 
OP-3HD  High-density OP-3 grade 
   
Material: S Grade
Description:
Tosoh S material is manufactured by fusing a synthetic super high-purity silica powder using Tosoh's proprietary oxy-hydrogen flame process. Thank to its extreme purity and complete lack of inclusions, S material is the next generation of material for semiconductor manufacturing.

Available in up to 1,200mm square ingots, S material is 450mm wafer ready.

Downloadable Files
   
Files are in PDF format (requires Adobe Reader to view):
Brochure »

SDS »  
RoHS »  
ISO Certificate »  

Optical Fused Silica

   
Material: ES Series
Description:
ES ingots are manufactured from high-purity SiCl4 using an oxy-hydrogen flame in a verneuil type process.

For very large parts, such as LCD photomasks, ES ingots are reflown into large rectangular blocks.

ES ingots have a typical purity that exceeds the detection limit of 10ppb in all elements, and are virtually free of bubbles and inclusions.

As a result, ES is the material of choice for LCD photomasks up to Gen. 10, and selected subgrades are widely used in leading edge stepper (KrF and ArF) and optics applications.

   
Material: ED-H
Description:
ED-H ingots are manufactured from high-purity SiCl4 in a VAD process.

ED-H ingots have a typical purity that exceeds the detection limit of 10ppb in all elements, and are virtually free of bubbles and inclusions.

Thanks to an OH content less than 100ppm, ED-H material exhibits superior transmission characteristics in the deep UV and is a material of choice for VUV applications down to 170nm.
Downloadable Files
   
Files are in PDF format (requires Adobe Reader to view):
Brochure »

SDS »  
RoHS »  
ISO Certificate »  
Tosoh USA, Inc.
3600 Gantz Road
Grove City, OH 43123
Tel: +1-614-277-4348
Fax: +1-614-875-8066
E-mail: info.tusa@tosoh.com